概要（Overview）

The ICOS WI-2220 is a wafer inspection tool designed specifically for LED defect inspection that assists device makers in lowering their production costs, while increasing device reliability. With the WI-2220, device makers can automate inspection of smaller die sizes that inhibit manual inspection, and for larger die sizes that require rapid corrective action to limit costly materials risk. The new system allows defect inspection of whole and diced wafers up to 200mm, with macro inspection sensitivity in the pre- and post-dice inspection (i.e. front- and back-end) of LED wafers.