概要（Overview）

The Candela 7100 series advanced defect detection and classification system is designed specifically for hard disk drive substrates and media. A high-powered dual-wavelength laser is optimized for current defect of interest (DOI) challenges, and multi-channel scatter detectors provide enhanced sensitivity for classification of sub-micron pits, bumps, particles, and buried defects on a full range of substrates. The capability and stability of the 7100 series defect inspector ensures that one platform can be used for multiple process control application points, reducing dependency on tools and methods such as atomic force, scanning electron, and transmission electron microscopes to investigate defects and identify root cause.