概要（Overview）

The Surfscan SP2XP is an unpatterned wafer surface quality inspection system for inspecting bare wafers and blanket films with sensitivity. This advanced wafer quality inspection system also introduces an ultra-high sensitivity operating mode to accelerate development of 3Xnm and 2Xnm next-generation devices. The Surfscan SP2XP boasts proprietary UV technology to provide high sensitivity down to 30nm defect sizes. Its optical design enables enhanced sensitivity to defects on rough films.