説明

No name Quantity Unit 1 host console 1 tower 2 Computer monitors and screen stands 1 tower 3 Keyboard and mouse set 1 Group 4 laser group 1 Group 5 Stage shaft and base 1 Group 6 6 inch stage parts-1 (Centering Ring: lifting wafer use ) 1 individual 7 6 inch stage parts-2 (POROUS Chuck) 1 individual 8 6 inch stage parts-3 (Ring Chuck) 1 individual 9 4 inch stage parts-1 (Centering Ring: lifting wafer use ) 1 individual 10 4 inch stage parts-2 (POROUS Chuck) 1 individual 11 4 inch stage parts-3 (Ring Chuck) 1 individual 12 Pre-Aligner 1 tower 13 Robot Arm 1 tower 14 Electronic Rack 5 tower 15 Robot Controller 1 tower 16 Special screwdriver 2 branch 17 key ( switch Inter Lock For status ) 2 branch 18 For testing machines wafer 5 piece 19 Robot Software CD & check list 1 piece / open 20 Offline Line Software manual 1 Book 21 Electrical plug 1 strip 22 Old version load portBase 6 Group 23 Load port Component 2 Bag 24 fixed bracket ( Fixed when moving the machine parts use ) 1 Bag

構成

Wafer Handler Characteristics RING POROUS PEEK Material Aluminum with hard Alumina (proprietary Poly Ether Ether Ketone black anodized plating composition / porosity) Available Sizes 2", 3", 4", 5" & 6" 2", 3", 4", 5", 6" & 8" 4", 6" & 8" Wafer Contact On ring only Uniform contact across Uniform contact across wafer backside wafer backside Vacuum Creation On ring only Across the complete Across multiple vacuum porous material channels available Typical Application SiC, Epi SiC, Sapphire, PSS, GaN on Sapphire, Si, GaN on Si or wafers with GaN on SiC GaN on PSS, GaN on Si, Si, very rough back side Ge, GaSb, lnSb

OEMモデルの説明

The Candela 8720 wafer inspection system uses proprietary optical technology to detect and classify a broad range of defects on high-end compound semiconductor materials up to 200mm in diameter. It is suitable for macro and micro defects and has various use cases in quality control, process control, and vendor comparison. It is used in industries such as HBLED, MicroLED, GaN RF and power applications, and communications. Options include SECS-GEM, light tower, diamond scribe, calibration standards, offline software, OCR, and photoluminescence.