概要（Overview）

The Puma 9550 is a darkfield wafer inspection platform that is part of the Puma 9500 Series. It introduces breakthrough optics and image acquisition technology that gives it twice the resolution at twice the speed of its predecessor. This allows the new Puma tools to monitor more layers and more defect types at darkfield speeds. The Puma 9550 Series wafer defect inspection system is backed by KLA-Tencor’s comprehensive service network to maintain its high performance and productivity.