概要（Overview）

The Candela 8520 is a surface inspection system that uses proprietary optical technology to measure scatter intensity at two angles of incidence. It detects and classifies a broad range of defects on Wide Band Gap materials including SiC and GaN, up to 200mm in diameter. It is used for substrate quality control, vendor comparison, process control, and tool monitoring in the SiC and GaN power device industries. Options include SECS-GEM, light tower, diamond scribe, calibration standards, offline software, OCR, and photoluminescence.