概要（Overview）

The AWX-FSI system is a quality control tool for unpatterned wafers that uses laser darkfield inspection to detect particles, scratches, area defects, and micro roughness (haze) on bare wafers. It is capable of measuring different wafer substrates, materials, and sizes, including bare silicon and doped or coated wafers. The system features automated handling of different open cassette types and a pre-aligner, allowing for flexibility in various environments such as R&D, production, and quality assurance. Additionally, the AWX inspection tool can handle 150mm, 200mm, and 300mm wafers and enables automatic wafer sorting based on inspection results.