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説明
Semilab WT-2020 (u-PCR) Carrier life time measurement構成
■ System Configuration . WT2020 main unit with scanning capability . Dual PC : DOS PC & Window PC . μ-PCR head for lifetime measurements . Application S/W : WSOS2 ( DOS PC ), Wintau 32 ( Windows PC ) . Vacuum pump . Utility : - Power : 220V or 115V, 50/60Hz - Vacuum : 1/4" 0.2 ~0.5 bar ■ Hadware Function Capability . μ-PCD measurement (904 nm Laser) . Laser Power Feedback . AUX Laser (Option) : 500 mW, 349nm . Others ■ Application . Monitoring defects and contamination ( bulk and surface region of Si wafer) . Characterization of thin film samples ■ Measurement . Carrier Lifetime Measurement ( μ-PCD/μ-PCD ) . High resolution mapping and discrete point measurements . Characterization of thin film samplesOEMモデルの説明
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SEMILAB
WT-2020
カテゴリ
Defect Inspection
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
66030
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2018
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説明
Semilab WT-2020 (u-PCR) Carrier life time measurement構成
■ System Configuration . WT2020 main unit with scanning capability . Dual PC : DOS PC & Window PC . μ-PCR head for lifetime measurements . Application S/W : WSOS2 ( DOS PC ), Wintau 32 ( Windows PC ) . Vacuum pump . Utility : - Power : 220V or 115V, 50/60Hz - Vacuum : 1/4" 0.2 ~0.5 bar ■ Hadware Function Capability . μ-PCD measurement (904 nm Laser) . Laser Power Feedback . AUX Laser (Option) : 500 mW, 349nm . Others ■ Application . Monitoring defects and contamination ( bulk and surface region of Si wafer) . Characterization of thin film samples ■ Measurement . Carrier Lifetime Measurement ( μ-PCD/μ-PCD ) . High resolution mapping and discrete point measurements . Characterization of thin film samplesOEMモデルの説明
提供なしドキュメント
ドキュメントなし