メインコンテンツにスキップ
6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
Moov logo

6" Fab For Sale from Moov - Click Here to Learn More
Moov Icon
市場 > Deposition > LAM RESEARCH / NOVELLUS > CONCEPT THREE "C3" ALTUS

CONCEPT THREE "C3" ALTUS

カテゴリ
Deposition
概要(Overview)

Concept Three ALTUS is a 300mm process module that delivers leading productivity and technology for contact and local interconnect applications. It uses Pulsed Nucleation Layer (PNL™) technology to integrate a high throughput nucleation layer with chemical vapor deposition (CVD bulk deposition). The Multi-Station Sequential Deposition (MSSD) architecture enables the nucleation layer and CVD fill to be performed within the same ALTUS chamber. This results in highly conformal tungsten films with improved film properties, benchmark productivity, and superior production availability. The integrated PNL and CVD approach produces the lowest Cost of Ownership tungsten deposition solution in the industry.

現在の掲載品

4

サービス

検査、保証、鑑定、ロジスティクス

トップ掲載リスト

このような製品をお持ちですか?
Moovに掲載品して、すぐに申し分ない購入者を見つけましょう。