説明
説明なし構成
Main System: ASM A412 SMIF System: E84, SECS/GEM, GEM300 Software Version: 6.85B Tool's Recipe Capability: Batch Does the tool have a SECS/GEM interface? Yes How many ports does this tool have? 2 Protocol Zones Allowed: FEOL Chamber ID's or Station ID's Chamber or Station Description RC1BOATA Node Nitride; Reactor1 Boat A RC1BOATB Node Nitride; Reactor1 Boat B RC2BOATA Node Nitride; Reactor2 Boat A RC2BOATB Node Nitride; Reactor2 Boat B RC1 Reactor 1 RC2 Reactor 2OEMモデルの説明
The ASM A412 is a vertical furnace system with a proven track record of more than 1,000 reactors shipped to customers worldwide and over 22 years of maturity in semiconductor manufacturing.ドキュメント
ドキュメントなし
ASM
A412
検証済み
カテゴリ
Furnaces / Diffusion
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
50603
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2011
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Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
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同様のリスト
すべて表示
ASM
A412
検証済み
カテゴリ
Furnaces / Diffusion
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
50603
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2011
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
Main System: ASM A412 SMIF System: E84, SECS/GEM, GEM300 Software Version: 6.85B Tool's Recipe Capability: Batch Does the tool have a SECS/GEM interface? Yes How many ports does this tool have? 2 Protocol Zones Allowed: FEOL Chamber ID's or Station ID's Chamber or Station Description RC1BOATA Node Nitride; Reactor1 Boat A RC1BOATB Node Nitride; Reactor1 Boat B RC2BOATA Node Nitride; Reactor2 Boat A RC2BOATB Node Nitride; Reactor2 Boat B RC1 Reactor 1 RC2 Reactor 2OEMモデルの説明
The ASM A412 is a vertical furnace system with a proven track record of more than 1,000 reactors shipped to customers worldwide and over 22 years of maturity in semiconductor manufacturing.ドキュメント
ドキュメントなし