AMAT CENTURA II  DPS Trench 150mm Config.xlsx

Applied Materials is committed to accelerating this new PPACt playbook for our customers and partners. We have the broadest and deepest portfolio of products for delivering PPACt innovations to the market. This portfolio encompasses the ability to create and deposit, shape and remove, modify, analyze, and connect materials and devices in new ways. We are unique in having a broad suite of process technology and metrology capabilities under one roof, and we have highly differentiated silicon and packaging lab capabilities. Our Integrated Materials Solutions co-optimize materials deposition, removal, modification, and analysis to create new materials and engineer new structures for high-performance, low-power chips at leading-edge nodes.

APPLIED MATERIALS (AMAT)

"This single-wafer, multi-chamber machine processes 5”, 6”, or 8” wafers for ≤200mm fabrication. Applications include: epitaxy, etch, CVD, plasma nitridation, and RTP. AMAT’s CENTURA II can accommodate up to 4 process chambers and 2 auxiliary chambers. Configuration includes load lock chambers, wafer handler robot, transfer wafer, process chambers, pneumatic panel, orientation chambergas panel, and cool down chamber. 
 
 Centura II is compatible with numerous auxiliary chamber types including: Lamp Heated CVD, PE TEOS DxZ, PE Silane DxZ, Gigafill SACVD, Ultima HDP-CVD, Ultima+ HDP-CVD, Ultima tE HDP-CVD, Tungsten WxZ, ALD Tungsten, WxP Tungsten Etch (HeWeb), Tectra Titanium, Tectra Tinitride, ALD Tinitride, Reactive Preclean+, Metal Etch DPS/(+), Poly Etch DPS/(+), Poly Etch Deep Trench (DT), ASP/(+), Oxide Super-E , Oxide eMxP+, Oxide MxP+, Oxide eMax, IPS Dielectric Etch, Poly Etch MxP, Poly Etch MxP+, R2 Metal Etch, Metal Etch MxP, Mark II Etch, Orienter, and various cool down chamber mechanisms."

CENTURA II

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APPLIED MATERIALS (AMAT)

CENTURA II

Dry / Plasma Etch

同様のリスト

APPLIED MATERIALS (AMAT)

CENTURA II

APPLIED MATERIALS (AMAT)

CENTURA II

APPLIED MATERIALS (AMAT)

CENTURA II

APPLIED MATERIALS (AMAT)

CENTURA II

APPLIED MATERIALS (AMAT)

CENTURA II

CENTURA II

Dry / Plasma Etch

同様のリスト

APPLIED MATERIALS (AMAT)

CENTURA II

APPLIED MATERIALS (AMAT)

CENTURA II

APPLIED MATERIALS (AMAT)

CENTURA II

APPLIED MATERIALS (AMAT)

CENTURA II

APPLIED MATERIALS (AMAT)

CENTURA II