説明
System controller (SBC, VGA board, AI/O board, DI/O board, HDD, SEI Board, OMS board, convectron gauge board, TC gauge board, Chamber interface borad, Stepper board, Robot 5-phase drvier, DC power supply) RF generator rack (RF bias generator, RF source generator) Process chamber (Ceramic ESC, RF bias matcher, chamber LID) Buffer chamber (Robot Pivot ass'y) Gas box (MFC, Air valve)構成
E-MAXOEMモデルの説明
The AMAT / APPLIED MATERIALS Centura 5200 is an Etchers & Ashers system. The centura 5200 can be used with 8” wafer size and oxidation etchers size is also 8”. The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.ドキュメント
ドキュメントなし
APPLIED MATERIALS (AMAT)
CENTURA 5200
検証済み
カテゴリ
Dry / Plasma Etch
最終検証: 60日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
92142
ウェーハサイズ:
不明
ヴィンテージ:
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示APPLIED MATERIALS (AMAT)
CENTURA 5200
カテゴリ
Dry / Plasma Etch
最終検証: 60日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
92142
ウェーハサイズ:
不明
ヴィンテージ:
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
System controller (SBC, VGA board, AI/O board, DI/O board, HDD, SEI Board, OMS board, convectron gauge board, TC gauge board, Chamber interface borad, Stepper board, Robot 5-phase drvier, DC power supply) RF generator rack (RF bias generator, RF source generator) Process chamber (Ceramic ESC, RF bias matcher, chamber LID) Buffer chamber (Robot Pivot ass'y) Gas box (MFC, Air valve)構成
E-MAXOEMモデルの説明
The AMAT / APPLIED MATERIALS Centura 5200 is an Etchers & Ashers system. The centura 5200 can be used with 8” wafer size and oxidation etchers size is also 8”. The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.ドキュメント
ドキュメントなし