説明
No HDD構成
Etch Process - 52L Staircase etch ➢ 6 Chamber, 4 Loadports ➢ Gases Used: Cl2,HBr,CHF3,SiCl4,CH4,SF6,O2,N2,SF6,Ar,He,CF4 ➢ ASSEMBLY, SERVER CORE SM-1U-2.83-1.5TB-500GB-HWR-DPNIC ➢ ASSEMBLY, SERVER FES SM 1U 2.33-8GB-500GB HWR SERIAL IPMI ➢ ASSEMBLY, SERVER E3 SM-1U-DUAL2.4-36GB-1.2TB.10K-HWR ➢ ASSEMBLY, SERVER RTS_TCS SM-1U-2.33-2GB-160GB-HWR ➢ Red/Amber/Green/Blue ( Front) DNET LIGHT TOWER, 4 LIGHT COVER (RAGB) W/ CLR DAUG ➢ SPECIFICATION, CR SELOP7 LOADPORT, 5.X FI ➢ KIT, KAWASAKI TX ROBOT SET, 5.4 FI ➢ KIT, 2-SLOT PASSTHROUGH, CONDOR 5.4 FI ➢ Configured Centris ➢ VACUUM ROBOT DRIVE, TRIAXIAL, EXTENDED Z ➢ BLADE, CERAMIC OPEN POCKET WITH DOME PADS, FX ROBOT, 300MM ➢ ASSEMBLY, X2 L-MOTION ANODIZED ALUM KALREZ 8085 SHAPE A SEAL PROFILE GATE ➢ ASSEMBLY, X2 L-MOTION BARE ALUM VITON SEAL GATE ➢ KIT,DUAL MONITOR ARM WITH KEYBOARD ASSY AND PC/MON ➢ HARNESS ASSY,FI PC TO KVM WITH EVC INTERFACE 10FT ➢ KIT, MOBILE WORKSTATION SINGLE 19" MONITOR PC SELE ➢ CABLE ASSY OPERATOR INTERFACE EVC M/M 75 FT ➢ iPUP-II Edwards iXL 180 ➢ ASSY, BMA ADVANTEDGE GT CHAMBER ➢ ASSY, COMMON IO CONTROLLER WITH ETHERCAT INTERFACE, FRAME B, ADVANTEDGE/TSV GT ➢ CHAMBER COOLING MANIFOLD, 300MM DPS 232 ➢ KIT, 1000T AND SLIT BAFFLE 0.25T MANOMETERS, GT ➢ MANOMETER, .25 TORR, 100 DEG. C, 1/2 VCR, HORIZ. CA ➢ XDCRPRESS 1000 TORR 1/2VCR 1% 9PIN DSUB ➢ TS HEATED MANOMETER ISO VALVE ASSY ➢ FORELINE : Manometer (XDCRPRESS ABS 10TORR 1/4VCR 0-10VDC OUT 9PD) ➢ ASSY, 4 ZONE V2 FIXED FULL SYM CATHODE, CENTRIS ➢ LID HPM Coated Al2O3, Dual Gas 300mm DPS ➢ HUB CENTER DUAL GAS SIDE FEED ➢ NOZZLE INSERT TGN Y2O3 ➢ KIT, KALREZ 8085 O-RING, TGN LID W/CERAMIC WLDMT ➢ "Tunable Gas Nozzle Lid Assy ➢ ring ID 1.110 CSD - Kalrez 8085" ➢ "Tunable Gas Nozzle Lid Assy ➢ ring ID 1.674 CSD - Kalrez 8085" ➢ "Tunable Gas Nozzle Lid Assy ➢ ring ID 2.734 CSD - Kalrez 8085" ➢ "Tunable Gas Nozzle Lid Assy ➢ ring ID .296 CSD - Kalrez 8085" ➢ SOURCE COIL 5.75/15 MESA HIGH POWER ➢ Lid Heater, O SHAPE ➢ PIPE COVER, PROCESS RING, C4Z V2 ESC ➢ SINGLE RING QUARTZ .16 HEIGHT 4ZONE ➢ Lower Chamber Liner, Y203 COAT, 4Z ➢ LINER UPPER THICK Y2O3 COATING 300MM DPS 532 ➢ LINER CATHODE Y203 W/SCREEN, 4Z ➢ Cover, screw, liner, 4Z ➢ Plasma Screen - Flow EQ, Yttria coated FE, 4Z ➢ Chamber Liner Door (single/dual shaft), Yttria coated ➢ Kalrez 8085 ➢ High Voltage Module ➢ RF GEN 13.56 MHZ, 6KW PARAMOUNT, 3PHASE 208 VA ➢ CABLE ASSY RF RG-217U 88FT 7/16M TO HN(M) ➢ MATCH RF 13.56 MHZ, 1.5KW PARAMOUNT 1513, 3PHASE 208 ➢ "Bias Generator ➢ 13.56Mhz, Paramount" ➢ CABLE ASSY RF RG-217/U 79FT HN(M) TO HN(M) R/A 2MH ➢ Bias Match, AE ➢ ASSY ESC STACK, FS, SE 4Z WITH FBR ➢ ASSEMBLY ESC BONDING, FULL SYM 4 ZONE V2 FS SE (Rev2b+) ➢ "FRC2 1000/1000 WITH IMPROVED FIRMWARE ➢ DLT2A213163R210" ➢ VALVE, THROTTLING GATE HEATED DN320 SERIES 65.1 RF IMMUNE DNET, ADVANTEDGE D8GT ➢ PUMP TURBO 2700RPM ISO320/KF40 1/4FVCR PURGE 240VAC ➢ CONTROLLER, TURBO PUMP ➢ KIT, MRAD DRIVER, HPS, ADVANTEDGE GT ➢ KIT, EYED IEP, ADVANTEDGE, MESA HPS ➢ Gas Panel, Centris Independent, 18 stick ➢ FILTER, NI, 1.125" C-SEAL, SANDWICH, OUTLET FILTRA ➢ LID HPM COATED AL203, DUAL GAS 300MM DPS ➢ PLASMA SCREEN Y203 COAT FLOW EQ ➢ DOOR SLIT VALVE Y203 COAT 300MM DPS232 ➢ LINER CATHODE Y203 W/SCREEN, 4Z ➢ Liner Lower Y2O3 Coat DPSII ➢ LINER UPPER THICK Y2O3 COATING 300MM DPS 532 ➢ Nozzle Insert TGN Y2O3 ➢ COVER, SCREW, LINER, 4 ZONE CATHODEOEMモデルの説明
提供なしドキュメント
APPLIED MATERIALS (AMAT)
Centris AdvantEdge G5 Mesa Poly
検証済み
カテゴリ
Dry / Plasma Etch
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
115165
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2015
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
Centris AdvantEdge G5 Mesa Poly
カテゴリ
Dry / Plasma Etch
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
115165
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2015
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available