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説明
Configured for 6" Wafers Standard Chuck LAM RESEARCH 13.56 MHz RF Power Source MKS Type 651 Pressure Controller UNIT Model UPC 1300 – HE 50 sccm TYLAN Model FC-280S – N2 1 slpm TYLAN Model FC-280S – N2 100 sccm TYLAN Model FC-280S – N2 500 sccm TYLAN Model FC-280S – N2 500 sccm TYLAN Model FC-280S – N2 1 slpm TYLAN Model FC-280S – N2 500 sccm Software Version V3.11構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし
DRYTEK
384T
カテゴリ
Dry / Plasma Etch
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
19861
ウェーハサイズ：
不明
ヴィンテージ：
不明
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説明
Configured for 6" Wafers Standard Chuck LAM RESEARCH 13.56 MHz RF Power Source MKS Type 651 Pressure Controller UNIT Model UPC 1300 – HE 50 sccm TYLAN Model FC-280S – N2 1 slpm TYLAN Model FC-280S – N2 100 sccm TYLAN Model FC-280S – N2 500 sccm TYLAN Model FC-280S – N2 500 sccm TYLAN Model FC-280S – N2 1 slpm TYLAN Model FC-280S – N2 500 sccm Software Version V3.11構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし