AUTOETCH 490
概要(Overview)
The AutoEtch 490 is part of the AutoEtch family, which was Lam’s initial product line. The first AutoEtch product was sold in January 1982. The AutoEtch product line includes the 490, 590, and 690 series for etching polysilicon, oxide, and aluminum film applications, respectively. Despite being more than fourteen years old, continued improvements in both reliability and performance have enabled Lam to continue to offer the AutoEtch series as a suitable product for film applications involving line-widths of 0.8 micron or greater and wafer sizes of six inches or smaller.
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LAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma Etchヴィンテージ: 状態: 改修済み最終確認23日前LAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma Etchヴィンテージ: 状態: 中古最終確認60日以上前LAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma Etchヴィンテージ: 状態: 中古最終確認60日以上前LAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma Etchヴィンテージ: 状態: 中古最終確認60日以上前
LAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma Etchヴィンテージ: 状態: 中古最終確認60日以上前LAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma Etchヴィンテージ: 状態: 中古最終確認60日以上前LAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma Etchヴィンテージ: 状態: 中古最終確認60日以上前LAM RESEARCH CORPORATION
AUTOETCH 490
Dry / Plasma Etchヴィンテージ: 状態: 中古最終確認60日以上前