説明
Complete system構成
•Polysilicon: 490 •Wafer size: 6 inch •Upgraded TFT monitors •Wafer detection •Incl maintenance console •Conditon: AS IS (No Chiller, No pump but with ENI RF Generator) Features: •Single-wafer processing •Fully automated microprocessor control •Cassette-to-cassette wafer processing •Vacuum load locked •Programmable, variable electrode spacing •Endpoint detection •Configurable for 3-inch to 6-inch wafers •Stand-alone or bulk-head mount configurationOEMモデルの説明
The AutoEtch 490 is part of the AutoEtch family, which was Lam’s initial product line. The first AutoEtch product was sold in January 1982. The AutoEtch product line includes the 490, 590, and 690 series for etching polysilicon, oxide, and aluminum film applications, respectively. Despite being more than fourteen years old, continued improvements in both reliability and performance have enabled Lam to continue to offer the AutoEtch series as a suitable product for film applications involving line-widths of 0.8 micron or greater and wafer sizes of six inches or smaller.ドキュメント
ドキュメントなし
LAM RESEARCH CORPORATION
AUTOETCH 490
検証済み
カテゴリ
Dry / Plasma Etch
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
65309
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
LAM RESEARCH CORPORATION
AUTOETCH 490
カテゴリ
Dry / Plasma Etch
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
65309
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Complete system構成
•Polysilicon: 490 •Wafer size: 6 inch •Upgraded TFT monitors •Wafer detection •Incl maintenance console •Conditon: AS IS (No Chiller, No pump but with ENI RF Generator) Features: •Single-wafer processing •Fully automated microprocessor control •Cassette-to-cassette wafer processing •Vacuum load locked •Programmable, variable electrode spacing •Endpoint detection •Configurable for 3-inch to 6-inch wafers •Stand-alone or bulk-head mount configurationOEMモデルの説明
The AutoEtch 490 is part of the AutoEtch family, which was Lam’s initial product line. The first AutoEtch product was sold in January 1982. The AutoEtch product line includes the 490, 590, and 690 series for etching polysilicon, oxide, and aluminum film applications, respectively. Despite being more than fourteen years old, continued improvements in both reliability and performance have enabled Lam to continue to offer the AutoEtch series as a suitable product for film applications involving line-widths of 0.8 micron or greater and wafer sizes of six inches or smaller.ドキュメント
ドキュメントなし