説明
New and unused; the process modul is still in their original packaging.構成
Product Description for Exelan Flex 45 - 2300 Exelan Flex 45 CFE PM, 200 mm - Top PI Chamber Manometer Baffle - Barrier Seal Door on VAT Rocker - 1600 L/s Edwards - 2300 Exelan Flex 45 Quick Clean kit w/e - 2300 Exelan Flex 45 Pend. Valve kit - 2300 Exelan Flex 45 RF Maintenance kit - 2300 Exelan Flex 45 Service Tool kit - 2300 Exelan Flex 45 Jetstream Gas Box - 2300 JetStream Gas Box - 9 Gas Configuration (JetStream) - JetStream Gas Line - Remote Interface Box (per line) - Remote Interface Box (per PM) - 2300 PeripheralsOEMモデルの説明
提供なしドキュメント
ドキュメントなし
カテゴリ
Dry / Plasma Etch
最終検証： 5日前
主なアイテムの詳細
状態：
New
稼働ステータス:
Deinstalled / Crated
製品ID：
145038
ウェーハサイズ：
8"/200mm
Gas Lines:
O2, C4F8, CH2F2, CF4, C4F6, CO, N2, Ar, SF6, CH3F, O2, H2, N2
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
LAM RESEARCH CORPORATION
2300 EXELAN FLEX45
カテゴリ
Dry / Plasma Etch
最終検証： 5日前
主なアイテムの詳細
状態：
New
稼働ステータス:
Deinstalled / Crated
製品ID：
145038
ウェーハサイズ：
8"/200mm
Gas Lines:
O2, C4F8, CH2F2, CF4, C4F6, CO, N2, Ar, SF6, CH3F, O2, H2, N2
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
New and unused; the process modul is still in their original packaging.構成
Product Description for Exelan Flex 45 - 2300 Exelan Flex 45 CFE PM, 200 mm - Top PI Chamber Manometer Baffle - Barrier Seal Door on VAT Rocker - 1600 L/s Edwards - 2300 Exelan Flex 45 Quick Clean kit w/e - 2300 Exelan Flex 45 Pend. Valve kit - 2300 Exelan Flex 45 RF Maintenance kit - 2300 Exelan Flex 45 Service Tool kit - 2300 Exelan Flex 45 Jetstream Gas Box - 2300 JetStream Gas Box - 9 Gas Configuration (JetStream) - JetStream Gas Line - Remote Interface Box (per line) - Remote Interface Box (per PM) - 2300 PeripheralsOEMモデルの説明
提供なしドキュメント
ドキュメントなし