説明
説明なし構成
Type of Loadlock LAM Number of Process Chamber 3 Chamber Configuration of Mainframe Signal Tower 3 Color Number Loadlock 2 Robot NO User Interface FRONT UI Computer NO TM Motherboard & Node Board YES Terminal Server YES EtherNet Hub YES Light Curtain N/A Transfer Robot Arm NO Gate Valve YES Loadlock gauge YES HPS TM Pressure Gauge YES HPS TM Pressure Control NO Airlock Pressure Gauge YES TM ISO Vlave YES HPS Slit Door YES TM VME Board NO Configuration of Process Module PM1 PM2 PM4 Model of Chamber 9400DSie 9400DSie 9400DSie Year of Construction 2010 2010 2010 Process Gauge NO NO NO Chamber Gauge NO NO NO Foreline Guage NO NO NO Pendulum valve NO NO YES Model of TMP NO NO NO Model of TMP Controller NO NO NO Model of TCP Generator(TOP) NO NO NO Model of Bias Generator(BOT) NO NO NO TCP Matcher YES YES YES Bias Matcher NO NO NO ESC/ chuck YES YES YES ESC Power Supply NO NO NO Backside Helium UPC YES YES YES VME Assembly NO NO NO Foreline Assembly NO NO NO OES NO NO NO Configuration of Power Rack Power 208VAC, 50/60Hz, Ф3, 272AMPSOEMモデルの説明
提供なしドキュメント
ドキュメントなし
カテゴリ
Dry / Plasma Etch
最終検証： 6日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
145019
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
LAM RESEARCH CORPORATION
ALLIANCE A6 9400DSiE
カテゴリ
Dry / Plasma Etch
最終検証： 6日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
145019
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
Type of Loadlock LAM Number of Process Chamber 3 Chamber Configuration of Mainframe Signal Tower 3 Color Number Loadlock 2 Robot NO User Interface FRONT UI Computer NO TM Motherboard & Node Board YES Terminal Server YES EtherNet Hub YES Light Curtain N/A Transfer Robot Arm NO Gate Valve YES Loadlock gauge YES HPS TM Pressure Gauge YES HPS TM Pressure Control NO Airlock Pressure Gauge YES TM ISO Vlave YES HPS Slit Door YES TM VME Board NO Configuration of Process Module PM1 PM2 PM4 Model of Chamber 9400DSie 9400DSie 9400DSie Year of Construction 2010 2010 2010 Process Gauge NO NO NO Chamber Gauge NO NO NO Foreline Guage NO NO NO Pendulum valve NO NO YES Model of TMP NO NO NO Model of TMP Controller NO NO NO Model of TCP Generator(TOP) NO NO NO Model of Bias Generator(BOT) NO NO NO TCP Matcher YES YES YES Bias Matcher NO NO NO ESC/ chuck YES YES YES ESC Power Supply NO NO NO Backside Helium UPC YES YES YES VME Assembly NO NO NO Foreline Assembly NO NO NO OES NO NO NO Configuration of Power Rack Power 208VAC, 50/60Hz, Ф3, 272AMPSOEMモデルの説明
提供なしドキュメント
ドキュメントなし