説明
MISSING ITEMS : Wafer Aligner, VCE boards, VME boards and the TM robot have been removed from this System構成
Two 9600SE Metal Etch Chambers Two DSQ Strip Chambers Software Version: Envision A2.1.1 -010 Operating System: Next 3.3 Loader /Transport System: Brooks VCE 8 Line Gas Box Two Noah 3300 Chillers w/ Controllers Gases Used: Boron Trichloride, Chlorine, Sulfur Hexafluoride, Oxygen, Nitrogen, Argon 2 Cassette Load / Unload Platens Remote Operator Station Remote Gas Box Assembly Remote Power Distribution BoxOEMモデルの説明
提供なしドキュメント
ドキュメントなし
LAM RESEARCH CORPORATION
ALLIANCE4 (A4)
検証済み
カテゴリ
Dry / Plasma Etch
最終検証: 60日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
76787
ウェーハサイズ:
8"/200mm
ヴィンテージ:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH CORPORATION
ALLIANCE4 (A4)
カテゴリ
Dry / Plasma Etch
最終検証: 60日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
76787
ウェーハサイズ:
8"/200mm
ヴィンテージ:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
MISSING ITEMS : Wafer Aligner, VCE boards, VME boards and the TM robot have been removed from this System構成
Two 9600SE Metal Etch Chambers Two DSQ Strip Chambers Software Version: Envision A2.1.1 -010 Operating System: Next 3.3 Loader /Transport System: Brooks VCE 8 Line Gas Box Two Noah 3300 Chillers w/ Controllers Gases Used: Boron Trichloride, Chlorine, Sulfur Hexafluoride, Oxygen, Nitrogen, Argon 2 Cassette Load / Unload Platens Remote Operator Station Remote Gas Box Assembly Remote Power Distribution BoxOEMモデルの説明
提供なしドキュメント
ドキュメントなし