説明

Poly Etcher

構成

RF system, pressure control system and temperature control system, including the RF generator, Phase/Magnitude Sensor, Cap Motor driver, turbo pump (TMP), Pendulum (Throttle) valve, Hoist, Electrostatic Chuck (ESC), heater, and coolant path. SYSTEM INTERCONNECT: 224-800096-830 SUPPLY CIRCUIT VOLTAGE RATING: 208VAC +10%, -10% FREQUENCY: 50/60 Hz SUPPLY CIRCUIT RATING: 3 Ph, 3 WIRE + PROTECTIVE GND PM FULL-LOAD CURRENT: 25.8 AMP RF FULL-LOAD CURRENT: 68.00 AMP RATING OF LARGEST LOAD: 38 AMP MAIN CB CURRENT RATING: 80 AMP RF CB RATING: 80 AMP RF generator type: AE Navigator II

OEMモデルの説明

REACTIVE ION ETCH (RIE) Conductor etch helps shape the electrically “active” materials of a semiconductor device. Even a slight variation in these miniature structures can degrade device performance. In fact, these structures are so tiny and sensitive that etch processes push the boundaries of the basic laws of physics and chemistry. Lam’s Kiyo® product family delivers the high-performance capabilities needed to precisely and consistently form these features precisely and with high productivity. For some applications, select models are also available through our Reliant® Systems as refurbished products, providing lower cost of ownership with the same quality assurance and performance as new systems.