説明
説明なし構成
Type of Loadlock: LAM Number of Process Chamber: 3 Chamber Configuration of Mainframe Signal Tower 3 Color Number Loadlock 2 Robot BROOKS MAG7 1409CHE11272 User Interface FRONT UI Computer YES TM Motherboard & Node Board YES Terminal Server YES EtherNet Hub YES Light Curtain N/A Transfer Robot Arm YES Gate Valve YES Loadlock gauge YES HPS TM Pressure Gauge YES HPS TM Pressure Control YES Airlock Pressure Gauge YES TM ISO Vlave YES HPS Slit Door YES TM VME Board YES Configuration of Process Module PM1 PM2 PM4 Remark Model of Chamber 4720XL 4720XL 4720XL Year of Construction 2014 2014 2014 Process Gauge MKS MKS MKS 625D-30518 Chamber Gauge MKS MKS MKS 625D-30518 Foreline Guage MKS MKS MKS 625D11TGEEV Pendulum valve YES YES YES Model of TMP STP-H301C STP-H301C STP-H301C Model of TMP Controller SCU-800 SCU-800 SCU-800 Model of TCP Generator(TOP) AE AE AE Model of Bias Generator(BOT) 1250 1250 1250 TCP Matcher YES YES YES Bias Matcher YES YES YES ESC/ chuck YES YES YES ESC Power Supply YES YES YES Backside Helium UPC YES YES YES VME Assembly YES YES YES Foreline Assembly YES YES YES OES YES YES YES Configuration of Power Rack Power 208VAC, 50/60Hz, Ф3, 272AMPSOEMモデルの説明
Etchers & Ashersドキュメント
ドキュメントなし
カテゴリ
Dry / Plasma Etch
最終検証： 6日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
145018
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH CORPORATION
RAINBOW 4720XL
カテゴリ
Dry / Plasma Etch
最終検証： 6日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
145018
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
Type of Loadlock: LAM Number of Process Chamber: 3 Chamber Configuration of Mainframe Signal Tower 3 Color Number Loadlock 2 Robot BROOKS MAG7 1409CHE11272 User Interface FRONT UI Computer YES TM Motherboard & Node Board YES Terminal Server YES EtherNet Hub YES Light Curtain N/A Transfer Robot Arm YES Gate Valve YES Loadlock gauge YES HPS TM Pressure Gauge YES HPS TM Pressure Control YES Airlock Pressure Gauge YES TM ISO Vlave YES HPS Slit Door YES TM VME Board YES Configuration of Process Module PM1 PM2 PM4 Remark Model of Chamber 4720XL 4720XL 4720XL Year of Construction 2014 2014 2014 Process Gauge MKS MKS MKS 625D-30518 Chamber Gauge MKS MKS MKS 625D-30518 Foreline Guage MKS MKS MKS 625D11TGEEV Pendulum valve YES YES YES Model of TMP STP-H301C STP-H301C STP-H301C Model of TMP Controller SCU-800 SCU-800 SCU-800 Model of TCP Generator(TOP) AE AE AE Model of Bias Generator(BOT) 1250 1250 1250 TCP Matcher YES YES YES Bias Matcher YES YES YES ESC/ chuck YES YES YES ESC Power Supply YES YES YES Backside Helium UPC YES YES YES VME Assembly YES YES YES Foreline Assembly YES YES YES OES YES YES YES Configuration of Power Rack Power 208VAC, 50/60Hz, Ф3, 272AMPSOEMモデルの説明
Etchers & Ashersドキュメント
ドキュメントなし