説明
LAM 9400 PTX 3 Chamber Parts Tool構成
Total 3 chambers 06MF – all intact, VCE board for A and B not available 06PM1 – chamber intact, no generator, no match, dip board and auto-tune board no available 06PM3 – chamber intact, no generator, no match, dip board and auto-tune board no available 06PM4 – chamber intact, no generator, no match, dip board and auto-tune board no available Tranfers robot is faulty – fuse blown Software PC – formatted- need to install LAM software All chamber gas box are intactOEMモデルの説明
TCP 9400 is part of Lam’s TCP product line of high-density, low-pressure systems that were introduced in late 1992. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. The TCP 9400 series is designed for polysilicon and polycide etch applications and is used to produce a broad range of advanced logic and memory devices. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates, with independent power control to the lower electrode, which improves etch results across a wider process window. The TCP system is designed to offer customers a reliable, lower cost of ownership solution to their advanced needs.ドキュメント
ドキュメントなし
カテゴリ
Dry / Plasma Etch
最終検証： 9日前
主なアイテムの詳細
状態：
Parts Tool
稼働ステータス:
不明
製品ID：
153995
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
LAM RESEARCH CORPORATION
TCP 9400
カテゴリ
Dry / Plasma Etch
最終検証： 9日前
主なアイテムの詳細
状態：
Parts Tool
稼働ステータス:
不明
製品ID：
153995
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
LAM 9400 PTX 3 Chamber Parts Tool構成
Total 3 chambers 06MF – all intact, VCE board for A and B not available 06PM1 – chamber intact, no generator, no match, dip board and auto-tune board no available 06PM3 – chamber intact, no generator, no match, dip board and auto-tune board no available 06PM4 – chamber intact, no generator, no match, dip board and auto-tune board no available Tranfers robot is faulty – fuse blown Software PC – formatted- need to install LAM software All chamber gas box are intactOEMモデルの説明
TCP 9400 is part of Lam’s TCP product line of high-density, low-pressure systems that were introduced in late 1992. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. The TCP 9400 series is designed for polysilicon and polycide etch applications and is used to produce a broad range of advanced logic and memory devices. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates, with independent power control to the lower electrode, which improves etch results across a wider process window. The TCP system is designed to offer customers a reliable, lower cost of ownership solution to their advanced needs.ドキュメント
ドキュメントなし