説明
Neither matching unit is in working condition The backing pump has failed There is an internal leak in the system, which is believed to be related to the slit valve構成
ICP/RIE Configured to run SF6, Hydrogen and Methane (ITO etch) Frequency: 50/60 hz Voltage: 208 VAC 3 Phase Full Load AMP: 40 AMP'sOEMモデルの説明
Etching Systemドキュメント
ドキュメントなし
OXFORD
100 180 ICP
検証済み
カテゴリ
Dry / Plasma Etch
最終検証: 16日前
主なアイテムの詳細
状態:
Used
稼働ステータス:
Installed / Idle
製品ID:
109932
ウェーハサイズ:
不明
ヴィンテージ:
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
OXFORD
100 180 ICP
カテゴリ
Dry / Plasma Etch
最終検証: 16日前
主なアイテムの詳細
状態:
Used
稼働ステータス:
Installed / Idle
製品ID:
109932
ウェーハサイズ:
不明
ヴィンテージ:
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Neither matching unit is in working condition The backing pump has failed There is an internal leak in the system, which is believed to be related to the slit valve構成
ICP/RIE Configured to run SF6, Hydrogen and Methane (ITO etch) Frequency: 50/60 hz Voltage: 208 VAC 3 Phase Full Load AMP: 40 AMP'sOEMモデルの説明
Etching Systemドキュメント
ドキュメントなし