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説明
Operational as-is構成
PlasmaTherm 720 RIE - Single chamber with load lock - Currently configured for 4" wafers - Can process up to 8"/200mm wafers (with proper tooling, available at additional cost) - Turbo Pump - AEI/RFPP RF5S 500W RF Generator - Leybold Trivac D65BCS Vacuum Pump - Leybold Trivac D25BCS Vacuum Pump - Neslab HX-75 Recirculating Chiller - Power Box - Process Software - Computer upgraded in 2011 by OEM / runs Win 98 - Set of Operation and Maintenance Manuals - 4 MFCs: *SF6 *N2 *CHF3 *O2OEMモデルの説明
提供なしドキュメント
ドキュメントなし
カテゴリ
Dry / Plasma Etch
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
36140
ウェーハサイズ：
4"/100mm, 8"/200mm
ヴィンテージ：
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
PLASMATHERM
SLR 720
カテゴリ
Dry / Plasma Etch
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
36140
ウェーハサイズ：
4"/100mm, 8"/200mm
ヴィンテージ：
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Operational as-is構成
PlasmaTherm 720 RIE - Single chamber with load lock - Currently configured for 4" wafers - Can process up to 8"/200mm wafers (with proper tooling, available at additional cost) - Turbo Pump - AEI/RFPP RF5S 500W RF Generator - Leybold Trivac D65BCS Vacuum Pump - Leybold Trivac D25BCS Vacuum Pump - Neslab HX-75 Recirculating Chiller - Power Box - Process Software - Computer upgraded in 2011 by OEM / runs Win 98 - Set of Operation and Maintenance Manuals - 4 MFCs: *SF6 *N2 *CHF3 *O2OEMモデルの説明
提供なしドキュメント
ドキュメントなし