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PLASMATHERM SLR 720
  • PLASMATHERM SLR 720
  • PLASMATHERM SLR 720
  • PLASMATHERM SLR 720
  • PLASMATHERM SLR 720
説明
Operational as-is
構成
PlasmaTherm 720 RIE - Single chamber with load lock - Currently configured for 4" wafers - Can process up to 8"/200mm wafers (with proper tooling, available at additional cost) - Turbo Pump - AEI/RFPP RF5S 500W RF Generator - Leybold Trivac D65BCS Vacuum Pump - Leybold Trivac D25BCS Vacuum Pump - Neslab HX-75 Recirculating Chiller - Power Box - Process Software - Computer upgraded in 2011 by OEM / runs Win 98 - Set of Operation and Maintenance Manuals - 4 MFCs: *SF6 *N2 *CHF3 *O2
OEMモデルの説明
提供なし
ドキュメント

ドキュメントなし

verified-listing-icon

検証済み

カテゴリ
Dry / Plasma Etch

最終検証: 60日以上前

主なアイテムの詳細

状態:

Used


稼働ステータス:

不明


製品ID:

36140


ウェーハサイズ:

4"/100mm, 8"/200mm


ヴィンテージ:

1995


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

PLASMATHERM

SLR 720

verified-listing-icon
検証済み
カテゴリ
Dry / Plasma Etch
最終検証: 60日以上前
listing-photo-4b1c1c1651a5429e849b2388f2aec10b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1689/4b1c1c1651a5429e849b2388f2aec10b/7e48b8f6db984d4fa09733ae2eee94ef_206f47761a45489c8c640c0e3afa0b99_mw.png
listing-photo-4b1c1c1651a5429e849b2388f2aec10b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1689/4b1c1c1651a5429e849b2388f2aec10b/ff0bb2cad2fd4d5f8e70f655fad8cda0_cfa9bd00c17f47e498e589f10565916e45005c_mw.jpeg
listing-photo-4b1c1c1651a5429e849b2388f2aec10b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1689/4b1c1c1651a5429e849b2388f2aec10b/377c72a088e842cc823644147528bef1_9b1072b0889c4b498db5d02683395b5f_mw.png
listing-photo-4b1c1c1651a5429e849b2388f2aec10b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1689/4b1c1c1651a5429e849b2388f2aec10b/bdb397309e264e7db2e96d440e319caf_310e65d8bab84d618c0f6e2edfce3bdb_mw.png
主なアイテムの詳細

状態:

Used


稼働ステータス:

不明


製品ID:

36140


ウェーハサイズ:

4"/100mm, 8"/200mm


ヴィンテージ:

1995


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Operational as-is
構成
PlasmaTherm 720 RIE - Single chamber with load lock - Currently configured for 4" wafers - Can process up to 8"/200mm wafers (with proper tooling, available at additional cost) - Turbo Pump - AEI/RFPP RF5S 500W RF Generator - Leybold Trivac D65BCS Vacuum Pump - Leybold Trivac D25BCS Vacuum Pump - Neslab HX-75 Recirculating Chiller - Power Box - Process Software - Computer upgraded in 2011 by OEM / runs Win 98 - Set of Operation and Maintenance Manuals - 4 MFCs: *SF6 *N2 *CHF3 *O2
OEMモデルの説明
提供なし
ドキュメント

ドキュメントなし