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PLASMATHERM VERSALINE ETCH

説明

ICP Etch - 3 Chamber - All same process

構成

System Configuration Transfer Module 150MM Dual Vacuum Loadlock Brooks Mag 7 Robot Ebara Dry Pump Process Modules ICP Gases BCL3 - 50sccm - Brooks GF125 CL2 - 50sccm - Brooks GF125 O2 - 100sccm - Brooks GF125 Ar - 100sccm - Brooks GF125 SF6 - 50sccm - Brooks GF125 N2 - 100sccm - Brooks GF125 HE - 100sccm - Brooks GF125 Turbo Pump - Edwards STP-A 1303CV Chiller - SMC Thermo Dry Pump - Ebara SR20N RF Gen #1 - ENI GWM-24A RF Gen #2 - MKS Elite

OEMモデルの説明

提供なし

ドキュメント

ファイルアイコン

Plasmatherm Versaline ICP.pdf

PLASMATHERM

VERSALINE ETCH

verified-listing-icon

検証済み

カテゴリ

Dry / Plasma Etch

最終検証： 22日前

主なアイテムの詳細

状態：

Used

稼働ステータス:

不明

製品ID：

138075

ウェーハサイズ：

6"/150mm

ヴィンテージ：

2016

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

同様のリスト

すべて表示

PLASMATHERM VERSALINE ETCH

PLASMATHERM

VERSALINE ETCH

Dry / Plasma Etch

ヴィンテージ： 2016状態：中古

最終確認22日前

PLASMATHERM VERSALINE ETCH

PLASMATHERM

VERSALINE ETCH

Dry / Plasma Etch

ヴィンテージ： 2012状態：中古

最終確認60日以上前

PLASMATHERM

VERSALINE ETCH

verified-listing-icon

検証済み

カテゴリ

Dry / Plasma Etch

最終検証： 22日前

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主なアイテムの詳細

状態：

Used

稼働ステータス:

不明

製品ID：

138075

ウェーハサイズ：

6"/150mm

ヴィンテージ：

2016

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

説明

ICP Etch - 3 Chamber - All same process

構成

System Configuration Transfer Module 150MM Dual Vacuum Loadlock Brooks Mag 7 Robot Ebara Dry Pump Process Modules ICP Gases BCL3 - 50sccm - Brooks GF125 CL2 - 50sccm - Brooks GF125 O2 - 100sccm - Brooks GF125 Ar - 100sccm - Brooks GF125 SF6 - 50sccm - Brooks GF125 N2 - 100sccm - Brooks GF125 HE - 100sccm - Brooks GF125 Turbo Pump - Edwards STP-A 1303CV Chiller - SMC Thermo Dry Pump - Ebara SR20N RF Gen #1 - ENI GWM-24A RF Gen #2 - MKS Elite

OEMモデルの説明

提供なし

ドキュメント

ファイルアイコン

Plasmatherm Versaline ICP.pdf

同様のリスト

すべて表示

PLASMATHERM VERSALINE ETCH

PLASMATHERM

VERSALINE ETCH

Dry / Plasma Etchヴィンテージ： 2016状態：中古最終検証：22日前

PLASMATHERM VERSALINE ETCH

PLASMATHERM

VERSALINE ETCH

Dry / Plasma Etchヴィンテージ： 2012状態：中古最終検証：60日以上前