
説明
The CVE module is compatible with SPTS' cluster platforms. The chamber design provides high etch rates, uniformity and efficiency.構成
Vacuum Pump and Chiller IncludedOEMモデルの説明
The CVE module is compatible with SPTS' cluster platforms, and has a unique chamber design which provides high etch rates, uniformity and efficiency. It is designed allow high volume production and the integration of XeF2 modules with the other process modules available from SPTS.ドキュメント
ドキュメントなし
カテゴリ
Dry / Plasma Etch
最終検証: 24日前
主なアイテムの詳細
状態:
Used
稼働ステータス:
Deinstalled / Crated
製品ID:
123899
ウェーハサイズ:
8"/200mm
Chiller:
HCE-002
Pumps:
Kashiyama
HDD / Software:
No
ヴィンテージ:
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
XACTIX CVE
カテゴリ
Dry / Plasma Etch
最終検証: 24日前
主なアイテムの詳細
状態:
Used
稼働ステータス:
Deinstalled / Crated
製品ID:
123899
ウェーハサイズ:
8"/200mm
Chiller:
HCE-002
Pumps:
Kashiyama
HDD / Software:
No
ヴィンテージ:
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
The CVE module is compatible with SPTS' cluster platforms. The chamber design provides high etch rates, uniformity and efficiency.構成
Vacuum Pump and Chiller IncludedOEMモデルの説明
The CVE module is compatible with SPTS' cluster platforms, and has a unique chamber design which provides high etch rates, uniformity and efficiency. It is designed allow high volume production and the integration of XeF2 modules with the other process modules available from SPTS.ドキュメント
ドキュメントなし