Previously under Orbotech that KLA acquired in 2019.

SPTS Technologies provides advanced wafer processing solutions to the world's leading semiconductor and microelectronic device manufacturers. We make electronics possible.

KLA / SPTS

The Monarch25 is a 25-wafer batch process module designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations.
High throughput, high uptime 25-wafer batch processing
Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint
Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume production

KLA / SPTS

PRIMAXX MONARCH 25

Dry / Plasma Etch

同様のリスト

KLA / SPTS

PRIMAXX MONARCH 25

KLA / SPTS

PRIMAXX MONARCH 25

PRIMAXX MONARCH 25

Dry / Plasma Etch

同様のリスト

KLA / SPTS

PRIMAXX MONARCH 25

KLA / SPTS

PRIMAXX MONARCH 25