説明
Vapor hydrogen fluoride (VHF) etch system De-installed, in working condition when taken offline構成
SPTS PRIMAXX MONARCH 25 Omega c2L Platform (up to 4 process modules) Local scrubber Wet Type CQ800 VHF Scrubber NaOH Automatic alkali supply storage tank systemOEMモデルの説明
The Monarch25 is a 25-wafer batch process module designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations. High throughput, high uptime 25-wafer batch processing Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume productionドキュメント
ドキュメントなし
カテゴリ
Dry / Plasma Etch
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
116047
ウェーハサイズ：
不明
ヴィンテージ：
2019
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
PRIMAXX MONARCH 25
カテゴリ
Dry / Plasma Etch
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
116047
ウェーハサイズ：
不明
ヴィンテージ：
2019
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Vapor hydrogen fluoride (VHF) etch system De-installed, in working condition when taken offline構成
SPTS PRIMAXX MONARCH 25 Omega c2L Platform (up to 4 process modules) Local scrubber Wet Type CQ800 VHF Scrubber NaOH Automatic alkali supply storage tank systemOEMモデルの説明
The Monarch25 is a 25-wafer batch process module designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations. High throughput, high uptime 25-wafer batch processing Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume productionドキュメント
ドキュメントなし