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UltraTrimmer 30

カテゴリ
Dry / Plasma Etch
概要(Overview)

Gas Cluster Ion Beam system TEL’s UltraTrimmer series provides precise control of film thickness by reducing surface roughness. Cutting edge technology enables industry leading performance: sub-nanometer thickness control, a wide range of dynamic correction and high-throughput processing. UltraTrimmer series realizes a variety of custom process profiles for silicon or compound substrate and contributes to yield improvement and performance enhancement.

現在の掲載品

3

サービス

検査、保証、鑑定、ロジスティクス

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