説明
C/C chamber(front monitor, inner gate, isolation vavle, dry pump, pressure S/W) T/C chamber(Fork, P/A ass'y, A/I board, isolation vavle, dry pump, power supply, gas interface board) P/C (process kits, matcher, TMP, back monitor, dry pump, chiller) power rack (ECC rack ass'y, top generator, bottom generator, RF board, pump board)構成
UNITY2_85DD DRMOEMモデルの説明
The Unity II is a platform introduced by TEL in 1995. It has gained a solid reputation for being one of the most reliable platforms available, with over 800 systems delivered to customers worldwide. In 1998, the Unity was recognized as the World Leader in Etch System Performance in the prestigious VLSI Customer Satisfaction Survey. The Unity II is a 2 chamber tool, focused on 200mm wafers, and various configurations are offered for wafer sizes from 150 to 300mm. It is a testament to its reliability and performance.ドキュメント
ドキュメントなし
TEL / TOKYO ELECTRON
UNITY II
検証済み
カテゴリ
Dry / Plasma Etch
最終検証: 60日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
92154
ウェーハサイズ:
不明
ヴィンテージ:
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示TEL / TOKYO ELECTRON
UNITY II
カテゴリ
Dry / Plasma Etch
最終検証: 60日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
92154
ウェーハサイズ:
不明
ヴィンテージ:
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
C/C chamber(front monitor, inner gate, isolation vavle, dry pump, pressure S/W) T/C chamber(Fork, P/A ass'y, A/I board, isolation vavle, dry pump, power supply, gas interface board) P/C (process kits, matcher, TMP, back monitor, dry pump, chiller) power rack (ECC rack ass'y, top generator, bottom generator, RF board, pump board)構成
UNITY2_85DD DRMOEMモデルの説明
The Unity II is a platform introduced by TEL in 1995. It has gained a solid reputation for being one of the most reliable platforms available, with over 800 systems delivered to customers worldwide. In 1998, the Unity was recognized as the World Leader in Etch System Performance in the prestigious VLSI Customer Satisfaction Survey. The Unity II is a 2 chamber tool, focused on 200mm wafers, and various configurations are offered for wafer sizes from 150 to 300mm. It is a testament to its reliability and performance.ドキュメント
ドキュメントなし