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説明
Pumps and chiller not included. Items needed to be replaced: Robot arm belts Drive motor Extension motor構成
System Features: PLC and touch screen control, 8" inch chuck Active substrate temperature control Vacuum Cassette Elevator System: TITAN TRION (Up to 8") Wafer: 3" (3 Inch wafers) using 8" Pallet loading (3 wafers per pallet) Load/Lock: 5 wafer slots Pump: BUSCH Transfer Chamber : will re-install robot assembly Robot Controller: Advantech controller Controller: BOC Controller Inert Gas Box MFC CF4 100 sccm MKS O2 50 sccm MKS Ar 50 sccm MKS CHF3 50 sccm MKS N2 100 sccm MKS Toxic Gas Box = BCL3 50 sccm MKS CL2 50 sccm MKS SICL4 50 sccm MKSOEMモデルの説明
Vacuum loadlocked plasma systemドキュメント
TRION
TITAN
カテゴリ
Dry / Plasma Etch
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
63718
ウェーハサイズ：
3"/75mm, 6"/150mm, 8"/200mm
ヴィンテージ：
不明
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