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6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

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6" Fab For Sale from Moov - Click Here to Learn More

TRION TITAN

説明

Pumps and chiller not included. Items needed to be replaced: Robot arm belts Drive motor Extension motor

構成

System Features: PLC and touch screen control, 8" inch chuck Active substrate temperature control Vacuum Cassette Elevator System: TITAN TRION (Up to 8") Wafer: 3" (3 Inch wafers) using 8" Pallet loading (3 wafers per pallet) Load/Lock: 5 wafer slots Pump: BUSCH Transfer Chamber : will re-install robot assembly Robot Controller: Advantech controller Controller: BOC Controller Inert Gas Box MFC CF4 100 sccm MKS O2 50 sccm MKS Ar 50 sccm MKS CHF3 50 sccm MKS N2 100 sccm MKS Toxic Gas Box = BCL3 50 sccm MKS CL2 50 sccm MKS SICL4 50 sccm MKS

OEMモデルの説明

Vacuum loadlocked plasma system

ドキュメント

ファイルアイコン

TRION TITAN.pdf

TRION

TITAN

verified-listing-icon

検証済み

カテゴリ

Dry / Plasma Etch

最終検証： 60日以上前

主なアイテムの詳細

状態：

Used

稼働ステータス:

不明

製品ID：

63718

ウェーハサイズ：

3"/75mm, 6"/150mm, 8"/200mm

ヴィンテージ：

不明

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

同様のリスト

すべて表示

TRION TITAN

TRION

TITAN

Dry / Plasma Etch

ヴィンテージ： 0状態：中古

最終確認60日以上前

TRION

TITAN

verified-listing-icon

検証済み

カテゴリ

Dry / Plasma Etch

最終検証： 60日以上前

listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/7a2621d1737441788dc7c91a0b351e44_ad44ce76306d4dd492270e1d08dee43045005c_mw.jpeg

listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/d66a235490104a4d9414b6e970a59ad6_0bc2f2a817fa4491b23ecddad501092645005c_mw.jpeg

listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/257671f6c3ad4078b065ef9f967ac15e_055178a9bcdb4108a16f4d7d97bc23fa45005c_mw.jpeg

listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/045bff4815d24002b1a5eaf6f9e4acb9_20240605141247_mw.jpg

listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/1c5a4553539c4ec69103ad58a8f689ed_trioncham1_mw.jpeg

listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/101ae6ed36794ceca27351e2573945f0_trioncham2_mw.jpeg

主なアイテムの詳細

状態：

Used

稼働ステータス:

不明

製品ID：

63718

ウェーハサイズ：

3"/75mm, 6"/150mm, 8"/200mm

ヴィンテージ：

不明

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

説明

Pumps and chiller not included. Items needed to be replaced: Robot arm belts Drive motor Extension motor

構成

System Features: PLC and touch screen control, 8" inch chuck Active substrate temperature control Vacuum Cassette Elevator System: TITAN TRION (Up to 8") Wafer: 3" (3 Inch wafers) using 8" Pallet loading (3 wafers per pallet) Load/Lock: 5 wafer slots Pump: BUSCH Transfer Chamber : will re-install robot assembly Robot Controller: Advantech controller Controller: BOC Controller Inert Gas Box MFC CF4 100 sccm MKS O2 50 sccm MKS Ar 50 sccm MKS CHF3 50 sccm MKS N2 100 sccm MKS Toxic Gas Box = BCL3 50 sccm MKS CL2 50 sccm MKS SICL4 50 sccm MKS

OEMモデルの説明

Vacuum loadlocked plasma system

ドキュメント

ファイルアイコン

TRION TITAN.pdf

同様のリスト

すべて表示

TRION TITAN

TRION

TITAN

Dry / Plasma Etchヴィンテージ： 0状態：中古最終検証：60日以上前