概要（Overview）

The EVA760 system can be set up using a wide range of complex configurations. This configurable equipment as well as all the others products of the range, can handle a large number of substrates per run. Its generously sized pumping system ensures a high throughput. Combined optical and mechanical (quartz) thickness measurement, ion assisted deposition (IAD), co­evaporation, partial pressures regulation through RGA, glow discharge... are all features that can be integrated into your system.