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説明
4 port NH3 Scrubber for GaN MOCVD Process構成
This unit was installed and tested in 2012. The unit was never used after the installation and testing.OEMモデルの説明
The Spectra exhaust management system is a cost-effective, reliable and high performance abatement solution for the latest generation of Flat Panel Display (FPD) and Solar Cell manufacturing processes.ドキュメント
ドキュメントなし
EDWARDS
SPECTRA G
カテゴリ
Environmental Chambers
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled / Palletized
製品ID：
80522
ウェーハサイズ：
不明
ヴィンテージ：
2012
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説明
4 port NH3 Scrubber for GaN MOCVD Process構成
This unit was installed and tested in 2012. The unit was never used after the installation and testing.OEMモデルの説明
The Spectra exhaust management system is a cost-effective, reliable and high performance abatement solution for the latest generation of Flat Panel Display (FPD) and Solar Cell manufacturing processes.ドキュメント
ドキュメントなし