説明
EPI Reactors構成
Epitaxial Reactor PE106 Argon Line H2 Line SiHCI3 (Silicon Source) with Bubbler and thermal controller N Type Dope Line C2H4 (Etylene Carbon Source) Box Description: 1. nr. 1 Carriage Module 2. nr. 1 Reactor Module 3. nr. 1 Power generator 4. nr. 1 Trolley for PC nr. 2 UPS nr. 1 PC + Monitor nr. 1Coaxial cables nr. 1 Accessories nr. Panel reactor 5. nr. 1 set of quartz/graphite pieces Reactor 6. nr. 1 Process Pump EB ara 7. nr. 1 Bubbler STD cod.16G702/R-3061 8. nr. 1 Thermochiller 9. nr. 1 Reaction chamber 10. nr. Cabinet BubblerOEMモデルの説明
提供なしドキュメント
ドキュメントなし
LPE
PE106A
カテゴリ
Epitaxial deposition (EPI)
最終検証： 14日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
143464
ウェーハサイズ：
不明
ヴィンテージ：
2020
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
EPI Reactors構成
Epitaxial Reactor PE106 Argon Line H2 Line SiHCI3 (Silicon Source) with Bubbler and thermal controller N Type Dope Line C2H4 (Etylene Carbon Source) Box Description: 1. nr. 1 Carriage Module 2. nr. 1 Reactor Module 3. nr. 1 Power generator 4. nr. 1 Trolley for PC nr. 2 UPS nr. 1 PC + Monitor nr. 1Coaxial cables nr. 1 Accessories nr. Panel reactor 5. nr. 1 set of quartz/graphite pieces Reactor 6. nr. 1 Process Pump EB ara 7. nr. 1 Bubbler STD cod.16G702/R-3061 8. nr. 1 Thermochiller 9. nr. 1 Reaction chamber 10. nr. Cabinet BubblerOEMモデルの説明
提供なしドキュメント
ドキュメントなし