説明
説明なし構成
1 - LPE PE 3061D EPI Reactor Left Handed version: access doors for maintenance are on your left when you are looking at the front wafer loading dock of the equipment GENMARK Robot Controller Controlled Gas lines: H2, N2, HC1, PH3, B2H6, PH3, Trichlorosilane PC Warm wall Does not include the liquid chlorosilane bubbler Known Damage: The susceptor was chipped on the edge and that the lower quartz plate between the susceptor is cracked in half. The lower plate most likely be welded but the susceptor can not be repaired and a new one would need to be sourced if the chipping of the susceptor is unacceptable. During deinstall we were unable to remove the gold lined quartz chamber and it was destroyed. As the tool set idle for a significant amount of time with the chamber installed internal shaft O-rings had become welded to the shaft of the quartz tube. These O-rings are not accessible with the chamber installed and could not be loosened. As the chamber was mechanically lifted for uninstall the welded O-rings caused stress on the chamber by pulling down on the shaft as the remainder of the chamber was raised resulting in a complete loss.OEMモデルの説明
Epitaxial Reactorドキュメント
ドキュメントなし
LPE
PE3061D
検証済み
カテゴリ
Epitaxial deposition (EPI)
最終検証： 19日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
113301
ウェーハサイズ：
不明
ヴィンテージ：
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LPE
PE3061D
カテゴリ
Epitaxial deposition (EPI)
最終検証： 19日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
113301
ウェーハサイズ：
不明
ヴィンテージ：
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
1 - LPE PE 3061D EPI Reactor Left Handed version: access doors for maintenance are on your left when you are looking at the front wafer loading dock of the equipment GENMARK Robot Controller Controlled Gas lines: H2, N2, HC1, PH3, B2H6, PH3, Trichlorosilane PC Warm wall Does not include the liquid chlorosilane bubbler Known Damage: The susceptor was chipped on the edge and that the lower quartz plate between the susceptor is cracked in half. The lower plate most likely be welded but the susceptor can not be repaired and a new one would need to be sourced if the chipping of the susceptor is unacceptable. During deinstall we were unable to remove the gold lined quartz chamber and it was destroyed. As the tool set idle for a significant amount of time with the chamber installed internal shaft O-rings had become welded to the shaft of the quartz tube. These O-rings are not accessible with the chamber installed and could not be loosened. As the chamber was mechanically lifted for uninstall the welded O-rings caused stress on the chamber by pulling down on the shaft as the remainder of the chamber was raised resulting in a complete loss.OEMモデルの説明
Epitaxial Reactorドキュメント
ドキュメントなし