説明

説明なし

構成

1 - LPE PE 3061D EPI Reactor Left Handed version: access doors for maintenance are on your left when you are looking at the front wafer loading dock of the equipment GENMARK Robot Controller Controlled Gas lines: H2, N2, HC1, PH3, B2H6, PH3, Trichlorosilane PC Warm wall Does not include the liquid chlorosilane bubbler Known Damage: The susceptor was chipped on the edge and that the lower quartz plate between the susceptor is cracked in half. The lower plate most likely be welded but the susceptor can not be repaired and a new one would need to be sourced if the chipping of the susceptor is unacceptable. During deinstall we were unable to remove the gold lined quartz chamber and it was destroyed. As the tool set idle for a significant amount of time with the chamber installed internal shaft O-rings had become welded to the shaft of the quartz tube. These O-rings are not accessible with the chamber installed and could not be loosened. As the chamber was mechanically lifted for uninstall the welded O-rings caused stress on the chamber by pulling down on the shaft as the remainder of the chamber was raised resulting in a complete loss.