説明
説明なし構成
Two process modules: 1) XeF2 etching chamber with end point detection 2) CVD deposition chamber used for oxide, silicon, and nitrideOEMモデルの説明
Versalis fxP - a cluster system supporting a mixture of etch and deposition process chambers (up to 6 modules in total), useful for R&D or pilot production, saving both capital expenditure and cleanroom footprint. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.ドキュメント
ドキュメントなし
KLA / SPTS
VERSALIS fxP
検証済み
カテゴリ
Etch/Asher
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
75494
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2018
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
VERSALIS fxP
カテゴリ
Etch/Asher
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
75494
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2018
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
Two process modules: 1) XeF2 etching chamber with end point detection 2) CVD deposition chamber used for oxide, silicon, and nitrideOEMモデルの説明
Versalis fxP - a cluster system supporting a mixture of etch and deposition process chambers (up to 6 modules in total), useful for R&D or pilot production, saving both capital expenditure and cleanroom footprint. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.ドキュメント
ドキュメントなし