概要（Overview）

The ASM A400XT is a high-performance 200mm vertical furnace with significantly improved capabilities compared to other similar furnaces in the market. It boasts an impressive 30-40% higher performance level, making it a highly efficient and productive tool for various thermal processing applications in semiconductor manufacturing. The A400XT's advanced features and enhanced performance contribute to increased throughput and improved process results, making it a valuable asset for semiconductor fabrication facilities.