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VTR 7000plus
概要（Overview）
The THERMCO AVIZA VTR 7000+ is an upgraded vertical furnace, designed as an improvement to the SVG Thermco VTR 6000/7000 series. It is capable of being configured for processing wafers in the 150mm to 200mm nodes, making it suitable for a range of semiconductor manufacturing applications. Notable features of the THERMCO AVIZA VTR 7000+ include a modern TMX tube controller, which replaces the outdated PCE system found in the VTR 6000/7000 series, a robotic controller for enhanced automation, and SPC functionality for monitoring equipment performance.
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