概要（Overview）

The SVG VTR 7107 TOX is a Vertical Diffusion Furnace designed for processing wafers with sizes ranging from 6 inches to 8 inches (100mm-200mm). This furnace is utilized in the semiconductor industry for thermal processing and diffusion of materials on the wafers. It offers a vertical configuration, ensuring efficient and uniform heating across the wafer surface, resulting in precise and controlled diffusion processes.