概要（Overview）

VF-3000 Low-Cost Mini Batch Vertical Furnace Features: - Low-cost equipment for back end users - Mini batch, 50 to 75 wafers processing is available for R&D to mass-production line - 4 to 8 inch wafer size is available - Max 4 cassette stocks - Excellent temperature control from low to medium high temperature range using an LGO heater - High-speed wafer transfer using a single wafer handling robot - Equipped with limited-function simple control system