概要（Overview）

The VTP 1500 is a vertical thermal processor that uses model-based temperature control to achieve precise and accurate temperature regulation. It is designed to fit within a small footprint, making it an ideal choice for facilities where space is at a premium. The VTP 1500 is capable of performing both LPCVD (Low Pressure Chemical Vapor Deposition) and diffusion processes, making it a versatile tool for a wide range of semiconductor manufacturing applications.