THERMCO 5200 is a diffusion furnace that is part of Thermco’s Model 5200 series. It is configurable from two to four-process chamber systems and can process substrates up to 150 mm in diameter, including Semiconductor, PV, LED, Nano, and MEMS substrates. The 5200 series has a 1,100mm flatzone, which allows for greater wafer processing capacity compared to the 5100 series, which has a 750mm flatzone. The furnace can be interfaced with a wide range of automation solutions and is constructed from cold rolled steel and stainless steel components. 

THERMCO

5200

MB-71	

MB-80

4104

MINI BRUTE MB-80

MB-81

2410	

4100	

4504

6204

2600ST

TMX 10000

TMX 9000

F1201R

5100

4300

THERMCO

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トップTHERMCO Furnaces / Diffusion

5200

MB-71

MB-80

4104

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すべてのTHERMCO Furnaces / Diffusion