説明
Installed Working Condition.構成
Type: NV8200P Dose2 Block3 Energy Config: 0 - 250Kv Midcurrent CE-Conformity: Yes Cryo-Pumps: 3x CTI Onboard 8 Cryo-Kompressor: CTI 9650 Low-Voltage Turbo-Pumps: Leybold: LH600C + LH1000C + LH151C Rough-Pumps: Edwards: ODP40 + QDP40 + IQDP80/QMB250 Wafersize: 8inch(200mm) Clamp-Type: E-Chuck with Non-μC Controller Wafer-Cooling: Galden HT110 with 20 degree Heatexchanger Gasbox: 3x Toxic 0,5L Size String1: Argon Carriergas; SEC-4400 String2: BF3 SDS-Low-Pressure Type VCR 1/4"; Brooks String3: PH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 String4: AsH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 Beam-Profiler Type: Belt-Drive Gear-Type's: Scan: Harmonic Tilt: Harmonic Source-Type: ELS4 IHC-Source without Vaporizer HV-Transformer: Mineral-Oil Light-Tower: red/yellow/green; no buzzer Main-Workstation Solaris SUN AXI 4HE Second-Workstation Solaris SUN Sparc5 Software-Version: 5.1.4.1 Network: 24port 100MB Ethernet Cell-Controller: 177 TypeOEMモデルの説明
NV-8200P, high current, parallel beam scan, uses GSD-A end station.ドキュメント
ドキュメントなし
AXCELIS
NV 8200P
検証済み
カテゴリ
High Current
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
39175
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
AXCELIS
NV 8200P
カテゴリ
High Current
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
39175
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Installed Working Condition.構成
Type: NV8200P Dose2 Block3 Energy Config: 0 - 250Kv Midcurrent CE-Conformity: Yes Cryo-Pumps: 3x CTI Onboard 8 Cryo-Kompressor: CTI 9650 Low-Voltage Turbo-Pumps: Leybold: LH600C + LH1000C + LH151C Rough-Pumps: Edwards: ODP40 + QDP40 + IQDP80/QMB250 Wafersize: 8inch(200mm) Clamp-Type: E-Chuck with Non-μC Controller Wafer-Cooling: Galden HT110 with 20 degree Heatexchanger Gasbox: 3x Toxic 0,5L Size String1: Argon Carriergas; SEC-4400 String2: BF3 SDS-Low-Pressure Type VCR 1/4"; Brooks String3: PH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 String4: AsH3 SDS-Low-Pressure Type VCR 1/4"; MKS1640 Beam-Profiler Type: Belt-Drive Gear-Type's: Scan: Harmonic Tilt: Harmonic Source-Type: ELS4 IHC-Source without Vaporizer HV-Transformer: Mineral-Oil Light-Tower: red/yellow/green; no buzzer Main-Workstation Solaris SUN AXI 4HE Second-Workstation Solaris SUN Sparc5 Software-Version: 5.1.4.1 Network: 24port 100MB Ethernet Cell-Controller: 177 TypeOEMモデルの説明
NV-8200P, high current, parallel beam scan, uses GSD-A end station.ドキュメント
ドキュメントなし