説明
High Current Implanter MAX ENERGY 200KeV 300MM TDK J1 LP W/RFID READER & MAPPING ELS4 TUNGSTEN, NON-VAP, LINED, SOURCE CRYO PUMPS: 4 X 320FX AEF CRYO PUMP: 1 X 320FX, 1X 250FE CRYO COMPRESSOR IS2000 & IS1000 TERMINAL ISOLATION TRANSFORMER 480VAC 50/50 Hz GAS BOX EXHAUST 4 LIGHT TOWER W/A/G/B - FRONT & REAR E84 OHT CONTROLLER COMMUNICATION KIT E84 4X PIO/IF MODULES: DMS-HB1 E84 PIO CABLE CONNECTOR ADAPTER SET GAS LINES STR# GAS MODULE GAS MFC FITTING 1 SUB-ATM FLOURIDE BF3 GF120X-909480 2 SUB-ATM HYDRIDE AsH3 GF120X-909480 3 SUB-ATM HYDRIDE PH3 GF120X-909480 4 SUB-ATM FLOURIDE GeF4 ENRICHED GF120X-909480 5 HIGH PRESSURE XENON GF120C-909811 CGA 580 W/VITRON 1/4" MVCR W/M NUT 6 HIGH PRESSURE SiF4 GF120C-909811 CGA 580 W/VITRON 1/4" MVCR W/M NUT EXTERNAL A ARGON GF120C-909811 EXTERNAL B N2 GF120C-909811 OPTIONAL BENEFITS PROCESS CHAMBER LINERS LEAD FLOOR EFEM IONIZATION BAR EFEM LIGHT SWITCH EFEM LIGHT CURTAIN AUX MOBILE WORKSTATION GRAPHITE SHIELD SCARA LINK 1 & 2 STAINLESS STELL HOSES FOR REMOTE MODULES TOXIC EXHAUST GAUGE SPLASH & DAMAGE SHIELD KIT RP1 N2 FLOW SENSOR ISOLATION VALVE IG11 ON SOURCE HOUSING LOADLOCK HIGH PURITY N2 CONNECTION TRANSFER CHAMBER LINER FARADAY COLLECTION TRAY SOURCE HOUSING CLEANING EXHAUST PC DOOR CABLE COVERS ENHANCED PRODUCTIVITY OPTION ENHANCED WATER COOLING (2.0kW) CAPACITY SW LICENSE EDWARDS TP1 LIFTING FIXTURE EDWARDS TP6 LIFITING FIXTURE構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし
カテゴリ
High Current
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
135037
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
AXCELIS
PURION H200
カテゴリ
High Current
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
135037
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
High Current Implanter MAX ENERGY 200KeV 300MM TDK J1 LP W/RFID READER & MAPPING ELS4 TUNGSTEN, NON-VAP, LINED, SOURCE CRYO PUMPS: 4 X 320FX AEF CRYO PUMP: 1 X 320FX, 1X 250FE CRYO COMPRESSOR IS2000 & IS1000 TERMINAL ISOLATION TRANSFORMER 480VAC 50/50 Hz GAS BOX EXHAUST 4 LIGHT TOWER W/A/G/B - FRONT & REAR E84 OHT CONTROLLER COMMUNICATION KIT E84 4X PIO/IF MODULES: DMS-HB1 E84 PIO CABLE CONNECTOR ADAPTER SET GAS LINES STR# GAS MODULE GAS MFC FITTING 1 SUB-ATM FLOURIDE BF3 GF120X-909480 2 SUB-ATM HYDRIDE AsH3 GF120X-909480 3 SUB-ATM HYDRIDE PH3 GF120X-909480 4 SUB-ATM FLOURIDE GeF4 ENRICHED GF120X-909480 5 HIGH PRESSURE XENON GF120C-909811 CGA 580 W/VITRON 1/4" MVCR W/M NUT 6 HIGH PRESSURE SiF4 GF120C-909811 CGA 580 W/VITRON 1/4" MVCR W/M NUT EXTERNAL A ARGON GF120C-909811 EXTERNAL B N2 GF120C-909811 OPTIONAL BENEFITS PROCESS CHAMBER LINERS LEAD FLOOR EFEM IONIZATION BAR EFEM LIGHT SWITCH EFEM LIGHT CURTAIN AUX MOBILE WORKSTATION GRAPHITE SHIELD SCARA LINK 1 & 2 STAINLESS STELL HOSES FOR REMOTE MODULES TOXIC EXHAUST GAUGE SPLASH & DAMAGE SHIELD KIT RP1 N2 FLOW SENSOR ISOLATION VALVE IG11 ON SOURCE HOUSING LOADLOCK HIGH PURITY N2 CONNECTION TRANSFER CHAMBER LINER FARADAY COLLECTION TRAY SOURCE HOUSING CLEANING EXHAUST PC DOOR CABLE COVERS ENHANCED PRODUCTIVITY OPTION ENHANCED WATER COOLING (2.0kW) CAPACITY SW LICENSE EDWARDS TP1 LIFTING FIXTURE EDWARDS TP6 LIFITING FIXTURE構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし