OPTORUN

OTFC-1300CBI	

OTFC-1300DBI

The OPTORUN OTFC-1300 is a high-performance optical coating system that can accommodate chamber sizes ranging from φ 600mm to φ1800mm. It features a 60-point optical thickness monitor and an RF ion source that achieves uniform ion beam distribution over a larger area at high ion current density. The system is capable of depositing over 100 layers using 2 EB guns and a multi-point crucible hearth or annular hearth. It also includes an auto-deposition control system for fully automated processes and offers the option of selecting either a center-driving or planetary substrate dome. The system uses diffusion pumps in combination with Polycold or Cryo-pumps.

Ion Beam / IBD

概要（Overview）

サービス

Ion Beam / IBD のメーカー

Ion Beam / IBD のトップ製品

OTFC-1300CBI

OTFC-1300DBI

OTFC-1300

NEXUS