説明

The SC Series is a compact, semi-automatic sampling device primarily used in laboratories and R&D facilities at semiconductor fabs for surface contamination analysis. It is also suitable for sampling flat surfaces ranging in size from 12 inches to 4 inches where high purity requirements (ppm, ppb, ppt levels) are necessary. This product is easy to operate, highly stable, and reliable, with a recovery rate of over 90%, and is protected by multiple patents. The SC Series can sample only one wafer at a time; however, by changing the fixture, it can sample the surface or edge of any wafer ranging in size from 12 inches to 4 inches. This product should be used in conjunction with a VPD and a clean fume hood. As this is a brand-new device, it takes one month from production and commissioning to crating and shipping. Please note that the price is subject to fluctuations in the yen-dollar exchange rate.

構成

Device Name: SC-9200; Operation: by PC (*3); Attaching / Detaching Liquid Holders: Auto; Supply of Sampling Liquid: Auto; Collection of Sampling Liquid: Auto; Basic Sampling Pattern: Ring-shaped, Fan-shaped, Fixed, Radius, Arc; Additional Sampling Pattern (*1): Side (Bevel), Rectangle, Circular Segment; Orientation Flat (*2): Added to sampling pattern of Ring-shaped, Fixed Radius, Side (Bevel); Auto Cleaning of Liquid Holders: Yes; Sucking-Up Type Collection of Liquid: Yes; Sampling of Hydrophilic Surface: Yes; Size (WxDxH): 690mmx550mmx790mm; Weight: 55Kg; Recommended Environment: Inside Clean Draft; Utilities: AC-100-240V, DIW, N2, CDA. *1-3: Those options will be quoted separately.

OEMモデルの説明

A semi-automated recovery system designed to collect trace nano-level metallic contaminants from the front and side surfaces of silicon wafers and compound semiconductor wafers. It ensures high analytical precision while minimizing the risk of human contamination.