説明
Laser System構成
構成なしOEMモデルの説明
ELS‐4000 is designed and engineered to perform at 400 Hz and 4 W with a narrower spectral bandwidth (2 pm) and a wavelength stability of better than ±0.25 pm. In addition, the pulse‐to‐pulse stability has been improved in stepper‐mode operation. The ELS‐4000 also employs a new microprocessor controlled gas injection system that permits uninterrupted operation for 10–20 h (7–10 million pulses).ドキュメント
ドキュメントなし
カテゴリ
Laser
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
21079
ウェーハサイズ：
不明
ヴィンテージ：
1993
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASML / CYMER
ELS-4000
カテゴリ
Laser
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
21079
ウェーハサイズ：
不明
ヴィンテージ：
1993
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Laser System構成
構成なしOEMモデルの説明
ELS‐4000 is designed and engineered to perform at 400 Hz and 4 W with a narrower spectral bandwidth (2 pm) and a wavelength stability of better than ±0.25 pm. In addition, the pulse‐to‐pulse stability has been improved in stepper‐mode operation. The ELS‐4000 also employs a new microprocessor controlled gas injection system that permits uninterrupted operation for 10–20 h (7–10 million pulses).ドキュメント
ドキュメントなし