説明
Soft laser marking system構成
Known issues: Laser output measured 1.69 W at current 120 and pulsewidth 195; report specifies output should exceed 2.4 W and recommends diode / flowcell replacement (both used over 3.5 years) CE calibration cannot be written normally; LPC replacement recommended X / Y galvos do not move during manual jobs, causing marking at the same point on the wafer; ME2 marker driver control board replacement recommended Aligner repeatability could not be tested due to abnormal marker operation Handling: Crossing Automation Model 21 robot, P/N 12000-057, software 1.5D Edge-grip handling Quartet Mechanics EGPB edge-grip aligner with buffer, replacing Asyst aligner (Qty 2) Asyst load ports without OHT Software: WLM version 3.4.1 Application / Control version 3.4.15.0 Electrical: 220 VAC, 22 A, 50-60 HzOEMモデルの説明
Automated, laser-based wafer marking and tracking systemドキュメント
ドキュメントなし
カテゴリ
Laser
最終検証： 9日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
154572
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
GSI LUMONICS
WaferMark SigmaClean 300 (WMSC300)
カテゴリ
Laser
最終検証： 9日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
154572
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Soft laser marking system構成
Known issues: Laser output measured 1.69 W at current 120 and pulsewidth 195; report specifies output should exceed 2.4 W and recommends diode / flowcell replacement (both used over 3.5 years) CE calibration cannot be written normally; LPC replacement recommended X / Y galvos do not move during manual jobs, causing marking at the same point on the wafer; ME2 marker driver control board replacement recommended Aligner repeatability could not be tested due to abnormal marker operation Handling: Crossing Automation Model 21 robot, P/N 12000-057, software 1.5D Edge-grip handling Quartet Mechanics EGPB edge-grip aligner with buffer, replacing Asyst aligner (Qty 2) Asyst load ports without OHT Software: WLM version 3.4.1 Application / Control version 3.4.15.0 Electrical: 220 VAC, 22 A, 50-60 HzOEMモデルの説明
Automated, laser-based wafer marking and tracking systemドキュメント
ドキュメントなし