説明
Laser System構成
System specifications: Power: ≤ 30 W. Pulseshape temp.:≥ 10 ns. Pulse to Pulse stability: ± 12 %. Beam divergence: ≤ 0.2 mrad. Bandwidth(T mode): ≤3 pm. Tuning range (T mode): ≥ 0.4 nm Pulse length: ~ 20ns PC control. Laser medium: ArF (193 nm), KrF (248 nm), XeCl (308 nm) CDRH-class (laser classification): IV Dimensions w/out computer: (L x H x W): 1960 x 1350 x 828 mm³ Weight: 875 kg Two separately charged and switched laser heads built as single unit. Choice of operations: a)Oscillator-Power-Amplifier (OPA) Mode b)Tuning Mode c)Two-Color Mode at pulse energies up to 500 mJ and repetition rates up to 50 Hz. All modules of system contained within laser cabinet. Wheels on unit for easy movement to different operating sites. Extra space available for optional halogen gas generator and 50-liter premix gas bottle.OEMモデルの説明
提供なしドキュメント
ドキュメントなし
LAMBDA PHYSIK
COMPEX 150
検証済み
カテゴリ
Laser
最終検証: 60日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
22738
ウェーハサイズ:
不明
ヴィンテージ:
1997
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAMBDA PHYSIK
COMPEX 150
カテゴリ
Laser
最終検証: 60日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
22738
ウェーハサイズ:
不明
ヴィンテージ:
1997
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Laser System構成
System specifications: Power: ≤ 30 W. Pulseshape temp.:≥ 10 ns. Pulse to Pulse stability: ± 12 %. Beam divergence: ≤ 0.2 mrad. Bandwidth(T mode): ≤3 pm. Tuning range (T mode): ≥ 0.4 nm Pulse length: ~ 20ns PC control. Laser medium: ArF (193 nm), KrF (248 nm), XeCl (308 nm) CDRH-class (laser classification): IV Dimensions w/out computer: (L x H x W): 1960 x 1350 x 828 mm³ Weight: 875 kg Two separately charged and switched laser heads built as single unit. Choice of operations: a)Oscillator-Power-Amplifier (OPA) Mode b)Tuning Mode c)Two-Color Mode at pulse energies up to 500 mJ and repetition rates up to 50 Hz. All modules of system contained within laser cabinet. Wheels on unit for easy movement to different operating sites. Extra space available for optional halogen gas generator and 50-liter premix gas bottle.OEMモデルの説明
提供なしドキュメント
ドキュメントなし