e-LiNE
カテゴリ
Lithography概要（Overview）
he Raith e-LiNE is an electron beam lithography tool which utilizes thermal field emission filament technology and a laser-interferometer controlled stage. The system is equipped with a load lock, an automatic height laser sensor, and both In-lens and SE2 detectors.
現在の掲載品
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検査、保証、鑑定、ロジスティクス
